Instructor: Professor
Tae Hun Chung
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Week
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Class Description |
Homework |
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Week 1 |
What is plasma? Examples of plasma
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Plasma fundamentals |
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Week
2 |
quasineutrality
and Debye length, plasma frequency, |
HW#2 |
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Collisions in plasmas: |
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Week 4 |
collision cross sections and mean free path, ionization and excitation cross sections, Coulomb cross section, resistivity, mobility, diffusion, ambipolar diffusion |
HW#3 |
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Fluid description of
plasma: |
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Week 6-7 |
continuity equation,
momentum transfer equation, energy balance equation |
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Week 8 |
RF conductivity and
power absorption |
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Processing
fundamentals and capactive source |
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Week 11 |
Inductively coupled plasmas |
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Week 12 |
Electron Cyclotron
Resonance(ECR) sources |
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Week 13 |
Modeling of plasma source | |
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Week 14 |
Characteristics of DC
discharges; |
HW#6 |
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Week 15 |
Microdischarge and
Plasma Display Panel
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HW#7 |
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Week 16 |
Final Exam |
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